YOUIBOT, the world's leading provider of mobile robot solutions, recently announced that its AMHS-based Automated Material Handling System (AMHS) cleanroom automation logistics solution designed for the semiconductor industry has been deployed on a large scale around the world, serving more than 300 customers, including TSMC, SMIC, Huatian Technology and other global semiconductor leading enterprises. This solution covers the entire industry chain from substrate preparation, epitaxial growth, wafer manufacturing to packaging and testing, and has become a key force to promote the development of semiconductor intelligent manufacturing.
As the core of the technology industry, semiconductor manufacturing has strict requirements for cleanliness, precision and stability in the production process. Traditional manual material handling methods are inefficient and easy to introduce pollution and errors. With its self-developed high-precision SLAM navigation technology and composite robot system, UAI has successfully overcome the logistics automation problem in semiconductor manufacturing with the help of AMHS. Its AMR (Autonomous Mobile Robot) products can operate stably in a Class 1 ultra-clean environment, with a vibration value strictly controlled below 0.1g, meeting the requirements of wafer-level micro-vibration suppression, and passing CE and SEMI S2 international certifications, with an operating accuracy of up to ±1mm.
The AMHS-based solution not only has excellent hardware performance, but also is equipped with a self-developed Fleet dispatching system. The system supports multi-model and multi-scene collaborative operations, and can dispatch more than 1,000 robots at the same time to achieve efficient path planning and dynamic task allocation. In addition, the system supports visual programming and map editing functions, which can quickly adjust logistics routes according to production needs, and supports map expansion, reconstruction, and local reconstruction, which greatly improves the flexibility and scalability of the production line.
In practical applications, the AMR system of Youai Zhihe has been successfully stationed in the production lines of many world-renowned semiconductor companies. For example, in the 8-inch wafer workshop of an international leading wafer factory, Youai Zhihe uses 50+ OW8 wafer cassette handling robots to realize the autonomous flow of SMIF POD between lithography machines, etching machines, CMP and other equipment with the help of AMHS, replacing the traditional manual handling method. The project greatly reduces labor costs, significantly improves material handling efficiency, and provides a reliable guarantee for the factory's continuous production × 7 hours a day.
"The semiconductor industry is in a critical period of opportunity for intelligent upgrading, and we are committed to helping customers achieve stable, flexible and efficient production and operation through innovative robotics and intelligent logistics solutions," said the founder of Youai Zhihe. In the future, we will continue to deepen the field of semiconductors and accelerate the intelligent transformation process of global semiconductor manufacturing. "